Air-clad silicon pedestal structures for broadband mid-infrared microphotonics
Author(s)Lin, Pao Tai; Singh, Vivek; Cai, Yan; Kimerling, Lionel C.; Agarwal, Anuradha Murthy
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Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ = 2.5 μm and λ = 3.7 μm, and an optical loss of 2.7 dB/cm is obtained at λ = 3.7 μm. Our pedestal silicon structures show 50∶50 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics.
DepartmentMassachusetts Institute of Technology. Materials Processing Center; Massachusetts Institute of Technology. Department of Materials Science and Engineering
Optical Society of America
Lin, Pao Tai et al. “Air-clad Silicon Pedestal Structures for Broadband Mid-infrared Microphotonics.” Optics Letters 38.7 (2013): 1031. © 2013 Optical Society of America
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