Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
Author(s)Lin, Hongtao; Li, Lan; Zou, Yi; Danto, Sylvain; Musgraves, J. David; Richardson, Kathleen; Kozacik, Stephen; Murakowski, Maciej; Prather, Dennis; Singh, Vivek; Kimerling, Lionel C.; Hu, Juejun; Lin, Pao Tai; Agarwal, Anuradha Murthy; ... Show more Show less
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We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
DepartmentMassachusetts Institute of Technology. Materials Processing Center; Massachusetts Institute of Technology. Department of Materials Science and Engineering
Optical Society of America
Lin, Hongtao et al. “Demonstration of high-Q Mid-infrared Chalcogenide Glass-on-silicon Resonators.” Optics Letters 38.9 (2013): 1470. © 2013 Optical Society of America
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