Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
Author(s)
Lin, Hongtao; Li, Lan; Zou, Yi; Danto, Sylvain; Musgraves, J. David; Richardson, Kathleen; Kozacik, Stephen; Murakowski, Maciej; Prather, Dennis; Singh, Vivek; Kimerling, Lionel C.; Hu, Juejun; Lin, Pao Tai; Agarwal, Anuradha Murthy; ... Show more Show less
DownloadKimerling_Demonstration of high-q.pdf (404.8Kb)
PUBLISHER_POLICY
Publisher Policy
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Terms of use
Metadata
Show full item recordAbstract
We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
Date issued
2013-04Department
MIT Materials Research Laboratory; Massachusetts Institute of Technology. Department of Materials Science and EngineeringJournal
Optics Letters
Publisher
Optical Society of America
Citation
Lin, Hongtao et al. “Demonstration of high-Q Mid-infrared Chalcogenide Glass-on-silicon Resonators.” Optics Letters 38.9 (2013): 1470. © 2013 Optical Society of America
Version: Final published version
ISSN
0146-9592
1539-4794