Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process

Author(s)
Sun, Rong; Cheng, Jing; Michel, Jurgen; Kimerling, Lionel C.
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Abstract
We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At 1550 nm , the average measured transmission loss coefficient is 2.5±0.1 dB/cm for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- 10[superscript 4] to 10[superscript 5] quality factors (Q) and extinction ratios as high as 25 dB .
Date issued
2009-07
URI
http://hdl.handle.net/1721.1/81305
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Microphotonics Center
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Sun, Rong, Jing Cheng, Jurgen Michel, and Lionel Kimerling. “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process.” Optics Letters 34, no. 15 (July 31, 2009): 2378.© 2009 Optical Society of America.
Version: Final published version
ISSN
0146-9592
1539-4794
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