Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
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We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations.
Date issued
2010-08Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer ScienceJournal
Nano Letters
Publisher
American Chemical Society (ACS)
Citation
Duan, Huigao, and Karl K. Berggren. “Directed Self-Assembly at the 10 Nm Scale by Using Capillary Force-Induced Nanocohesion.” Nano Lett. 10, no. 9 (September 8, 2010): 3710–3716.
Version: Author's final manuscript
ISSN
1530-6984
1530-6992