Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
Author(s)Duan, Huigao; Berggren, Karl K.
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We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
American Chemical Society (ACS)
Duan, Huigao, and Karl K. Berggren. “Directed Self-Assembly at the 10 Nm Scale by Using Capillary Force-Induced Nanocohesion.” Nano Lett. 10, no. 9 (September 8, 2010): 3710–3716.
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