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dc.contributor.authorGotrik, Kevin W.
dc.contributor.authorTavakkoli Kermani Ghariehali, Amir
dc.contributor.authorHannon, Adam F.
dc.contributor.authorAlexander-Katz, Alfredo
dc.contributor.authorRoss, Caroline A.
dc.contributor.authorBerggren, Karl K.
dc.date.accessioned2014-04-07T19:47:07Z
dc.date.available2014-04-07T19:47:07Z
dc.date.issued2012-06
dc.date.submitted2011-12
dc.identifier.issn0036-8075
dc.identifier.issn1095-9203
dc.identifier.urihttp://hdl.handle.net/1721.1/86080
dc.description.abstractThe registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for some applications. We found that a bilayer film of a cylindrical-morphology block copolymer, templated by an array of posts functionalized with a brush attractive to the majority block, can form a rich variety of three-dimensional structures consisting of cylinder arrays with controllable angles, bends, and junctions whose geometry is controlled by the template periodicity and arrangement. This technique allows control of microdomain patterns and the ability to route and connect microdomains in specific directions.en_US
dc.description.sponsorshipSemiconductor Research Corporationen_US
dc.description.sponsorshipUniversity of California, Los Angeles. Center on Functional Engineered Nano Architectonicsen_US
dc.description.sponsorshipNanoelectronics Research Initiativeen_US
dc.description.sponsorshipSingapore-MIT Allianceen_US
dc.language.isoen_US
dc.publisherAmerican Association for the Advancement of Science (AAAS)en_US
dc.relation.isversionofhttp://dx.doi.org/10.1126/science.1218437en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceProf. Berggrenen_US
dc.titleTemplating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Filmsen_US
dc.typeArticleen_US
dc.identifier.citationTavakkoli K. G., A., K. W. Gotrik, A. F. Hannon, A. Alexander-Katz, C. A. Ross, and K. K. Berggren. “Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films.” Science 336, no. 6086 (June 8, 2012): 1294–1298.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Materials Science and Engineeringen_US
dc.contributor.departmentMassachusetts Institute of Technology. Research Laboratory of Electronicsen_US
dc.contributor.mitauthorTavakkoli Kermani Ghariehali, Amiren_US
dc.contributor.mitauthorGotrik, Kevin W.en_US
dc.contributor.mitauthorHannon, Adam F.en_US
dc.contributor.mitauthorAlexander-Katz, Alfredoen_US
dc.contributor.mitauthorRoss, Caroline A.en_US
dc.contributor.mitauthorBerggren, Karl K.en_US
dc.relation.journalScienceen_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dspace.orderedauthorsTavakkoli K. G., A.; Gotrik, K. W.; Hannon, A. F.; Alexander-Katz, A.; Ross, C. A.; Berggren, K. K.en_US
dc.identifier.orcidhttps://orcid.org/0000-0003-2262-1249
dc.identifier.orcidhttps://orcid.org/0000-0002-9498-7808
dc.identifier.orcidhttps://orcid.org/0000-0001-7453-9031
dc.identifier.orcidhttps://orcid.org/0000-0001-5554-1283
dspace.mitauthor.errortrue
mit.licenseOPEN_ACCESS_POLICYen_US
mit.metadata.statusComplete


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