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dc.contributor.authorVázquez, Carmen
dc.contributor.authorTapetado, Alberto
dc.contributor.authorOrcutt, Jason Scott
dc.contributor.authorMeng, Huaiyu
dc.contributor.authorRam, Rajeev J.
dc.contributor.authorVazquez, Carmen
dc.date.accessioned2014-10-07T17:51:07Z
dc.date.available2014-10-07T17:51:07Z
dc.date.issued2014-03
dc.identifier.issn0277-786X
dc.identifier.urihttp://hdl.handle.net/1721.1/90589
dc.description.abstractSilicon is considered a promising platform for photonic integrated circuits as they can be fabricated in state-of-the-art electronics foundaries with integrated CMOS electronics. While much of the existing work on CMOS photonics has used directional couplers for power splitting, multimode interference (MMI) devices may have relaxed fabrication requirements and smaller footprints, potentially energy efficient designs. They have already been used as 1x2 splitters, 2x1 combiners in Quadrature Phase Shift Keying modulators, and 3-dB couplers among others. In this work, 3-dB, butterfly and cross MMI couplers are realized on bulk CMOS technology. Footprints from around 40um2 to 200 um2 are obtained. MMI tolerances to manufacturing process and bandwidth are analyzed and tested showing the robustness of the MMI devices.en_US
dc.description.sponsorshipFundación Caja Madriden_US
dc.description.sponsorshipSpain. Ministerio de Economía y Competitividad (project TEC2012-37983-C03-02)en_US
dc.description.sponsorshipSpain. Ministerio de Economía y Competitividad (grant EEBB- 1-13-07511)en_US
dc.description.sponsorshipSpain. Ministerio de Educación y Ciencia (grant PRX12/00007)en_US
dc.language.isoen_US
dc.publisherSociety of Photo-optical Instrumentation Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1117/12.2039730en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.titleTolerance analysis for efficient MMI devices in silicon photonicsen_US
dc.typeArticleen_US
dc.identifier.citationVázquez, Carmen, Alberto Tapetado, Jason Orcutt, Huaiyu Charles Meng, and Rajeev Ram. “Tolerance Analysis for Efficient MMI Devices in Silicon Photonics.” Edited by Joel Kubby and Graham T. Reed. Silicon Photonics IX (March 8, 2014). (Proc. SPIE 8990).en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.departmentMassachusetts Institute of Technology. Research Laboratory of Electronicsen_US
dc.contributor.mitauthorMeng, Huaiyuen_US
dc.contributor.mitauthorRam, Rajeev J.en_US
dc.contributor.mitauthorOrcutt, Jason Scotten_US
dc.contributor.mitauthorVazquez, Carmenen_US
dc.contributor.mitauthorTapetado, Albertoen_US
dc.relation.journalSilicon photonics IXen_US
dc.eprint.versionFinal published versionen_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
eprint.statushttp://purl.org/eprint/status/NonPeerRevieweden_US
dspace.orderedauthorsVázquez, Carmen; Tapetado, Alberto; Orcutt, Jason; Meng, Huaiyu Charles; Ram, Rajeeven_US
dc.identifier.orcidhttps://orcid.org/0000-0002-7635-8266
dc.identifier.orcidhttps://orcid.org/0000-0003-0420-2235
dspace.mitauthor.errortrue
mit.licensePUBLISHER_POLICYen_US
mit.metadata.statusComplete


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