Suspended nanochannel resonators at attogram precision
Author(s)Cermak, Nathan; Payer, Kristofor Robert; Shen, Wenjiang; Lee, Jungchul; Olcum, Selim A.; Wasserman, Steven; Manalis, Scott R; ... Show more Show less
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Nanomechanical resonators can quantify individual particles down to a single atom; however the applications are limited due to their degraded performance in solution. Suspended micro- and nanochannel resonators can achieve vacuum level performances for samples in solution since the target analyte flows through an integrated channel within the resonator. Here we report on a new generation suspended nanochannel resonator (SNR) that operates at approximately 2 MHz with quality factors between 10,000-20,000. The SNR is measured to have a mass sensitivity of 8.2 mHz/attogram. With an optimized oscillator system, we show that the resonator can be oscillated with a mass equivalent frequency stability of 0.85 attogram (4 parts-perbillion) at 1 kHz bandwidth, which is 1.8 times the calculated stability imposed by the thermal noise. We demonstrate the use of this mass resolution by quantifying the mass and concentration of nanoparticles down to 10 nm in solution.
DepartmentMassachusetts Institute of Technology. Computational and Systems Biology Program; Massachusetts Institute of Technology. Department of Biological Engineering; Koch Institute for Integrative Cancer Research at MIT
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Institute of Electrical and Electronics Engineers (IEEE)
Olcum, Selim, Nathan Cermak, Steven C. Wasserman, Kris Payer, Wenjiang Shen, Jungchul Lee, and Scott R. Manalis. “Suspended Nanochannel Resonators at Attogram Precision.” 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (January 2014).
Author's final manuscript