Sacrificial-Post Templating Method for Block Copolymer Self-Assembly
Author(s)
Alexander-Katz, Alfredo; Ross, Caroline A.; Berggren, Karl K.; Tavakkoli Kermani Ghariehali, Amir; Nicaise, Sam; Hannon, Adam F.; Gotrik, Kevin W.; ... Show more Show less
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A sacrificial-post templating method is presented for directing block copolymer self-assembly to form nanostructures consisting of monolayers and bilayers of microdomains. In this approach, the topographical post template is removed after self-assembly and therefore is not incorporated into the final microdomain pattern. Arrays of nanoscale holes of different shapes and symmetries, including mesh structures and perforated lamellae with a bimodal pore size distribution, are produced. The ratio of the pore sizes in the bimodal distributions can be varied via the template pitch, and agrees with predictions of self consistent field theory.
Date issued
2013-07Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Research Laboratory of ElectronicsJournal
Small
Publisher
Wiley Blackwell
Citation
Tavakkoli K. G., Amir, Samuel M. Nicaise, Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, and Karl K. Berggren. “Sacrificial-Post Templating Method for Block Copolymer Self-Assembly.” Small 10, no. 3 (July 10, 2013): 493–499.
Version: Author's final manuscript
ISSN
16136810
1613-6829