Membrane-integrated superconducting nanowire single-photon detectors

Author(s)
Najafi, Faraz; Mower, Jacob; Hu, Xiaolong; Bellei, Francesco; Kharel, Prashanta; ... Show more
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Abstract
We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
Description
CLEO: QELS--Fundamental Science, San Jose, California United States, June 9-14, 2013
Date issued
2013-06
URI
http://hdl.handle.net/1721.1/92843
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Journal
CLEO: QELS - Fundamental Science
Publisher
Optical Society of America
Citation
Najafi, F., J. Mower, X. Hu, F. Bellei, P. Kharel, A. Dane, Y. Ivry, L. Cheong, K. Sunter, D. Englund and K. K. Berggren. "Membrane-integrated superconducting nanowire single-photon detectors." CLEO: QELS - Fundamental Science, San Jose, California United States, June 9-14, 2013.
Version: Author's final manuscript
Other identifiers
QF1A.6.pdf
ISBN
9781557529732
978-1-55752-972-5
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