Interpixel crosstalk in a 3D-integrated active pixel sensor for x-ray detection
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MIT Lincoln Laboratories and MIT Kavli Institute for Astrophysics and Space Research have developed an active pixel sensor for use as a photon counting device for imaging spectroscopy in the soft X-ray band. A silicon-on-insulator (SOI) readout circuit was integrated with a high-resistivity silicon diode detector array using a per-pixel 3D integration technique developed at Lincoln Laboratory. We have tested these devices at 5.9 keV and 1.5 keV. Here we examine the interpixel cross-talk measured with 5.9 keV X-rays.
Date issued
2010-07Department
Lincoln Laboratory; MIT Kavli Institute for Astrophysics and Space ResearchJournal
Proceedings of SPIE--the International Society for Optical Engineering
Publisher
SPIE
Citation
Beverly LaMarr, Mark Bautz, Rick Foster, Steve Kissel, Gregory Prigozhin and Vyshnavi Suntharalingam, "Interpixel crosstalk in a 3D-integrated active pixel sensor for x-ray detection", Proc. SPIE 7742, 77422B (2010); doi:10.1117/12.857137 © 2010 SPIE
Version: Final published version
ISSN
0277-786X