Binary matrices of optimal autocorrelations as alignment marks

Author(s)
Skirlo, Scott A.; Lu, Ling; Soljacic, Marin
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Abstract
The authors define a new class of binary matrices by maximizing the peak-sidelobe distances in the aperiodic autocorrelations. These matrices can be used as robust position marks for in-plane translational spatial alignment. The optimal square matrices of dimensions up to 7 × 7 and optimal diagonally symmetric matrices of 8 × 8 and 9 × 9 were found by exhaustive searches.
Date issued
2015-02
URI
http://hdl.handle.net/1721.1/108443
Department
Massachusetts Institute of Technology. Department of Physics
Journal
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Publisher
American Vacuum Society (AVS)
Citation
Skirlo, Scott A.; Lu, Ling and Soljačić, Marin. "Binary matrices of optimal autocorrelations as alignment marks." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 33, no. 2 (February 2015).
Version: Author's final manuscript
ISSN
2166-2746
2166-2754
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