Substrate-blind photonic integration based on high-index glass materials
Author(s)Lin, Hongtao; Li, Lan; Zou, Yi; Du, Qingyang; Ogbuu, Okechukwu; Smith, Charmayne; Koontz, Erick; Musgraves, David; Richardson, Kathleen; Hu, Juejun; ... Show more Show less
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Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures ( < 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.
DepartmentMassachusetts Institute of Technology. Department of Materials Science and Engineering
Proceedings of SPIE--the Society of Photo-Optical Instrumentation Engineers
Lin, Hongtao et al. “Substrate-Blind Photonic Integration Based on High-Index Glass Materials.” Proceedings of SPIE, Nanophotonics and Micro/Nano Optics II, October 2014, Beijing, China, edited by Zhiping Zhou and Kazumi Wada, SPIE, November 2014. © 2014 SPIE
Final published version