The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)
Author(s)Arutt, Charles N; Alles, Michael L; Liao, Wenjun; Gong, Huiqi; Davidson, Jim L; Schrimpf, Ronald D; Reed, Robert A; Weller, Robert A; Bolotin, Kirill; Nicholl, Ryan; Pham, Thang Toan; Zettl, Alex; Li, Mo; Alphenaar, Bruce W; Lin, Ji-Tzuoh; Shurva, Pranoy Deb; McNamara, Shamus; Walsh, Kevin M; Feng, Philip X-L; Hutin, Louis; Ernst, Thomas; Homeijer, Brian D; Polcawich, Ronald G; Proie, Robert M; Jones, Jacob L; Glaser, Evan R; Cress, Cory D; Bassiri-Gharb, Nazanin; Du, Qingyang; Hu, Juejun; ... Show more Show less
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The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III–V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.
DepartmentMassachusetts Institute of Technology. Department of Materials Science and Engineering
Semiconductor Science and Technology
Arutt, Charles N et al. “The Study of Radiation Effects in Emerging Micro and Nano Electro Mechanical Systems (M and NEMs).” Semiconductor Science and Technology 32, 1 (December 2016): 013005 © 2016 IOP Publishing Ltd
Author's final manuscript