The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)
Author(s)
Arutt, Charles N; Alles, Michael L; Liao, Wenjun; Gong, Huiqi; Davidson, Jim L; Schrimpf, Ronald D; Reed, Robert A; Weller, Robert A; Bolotin, Kirill; Nicholl, Ryan; Pham, Thang Toan; Zettl, Alex; Li, Mo; Alphenaar, Bruce W; Lin, Ji-Tzuoh; Shurva, Pranoy Deb; McNamara, Shamus; Walsh, Kevin M; Feng, Philip X-L; Hutin, Louis; Ernst, Thomas; Homeijer, Brian D; Polcawich, Ronald G; Proie, Robert M; Jones, Jacob L; Glaser, Evan R; Cress, Cory D; Bassiri-Gharb, Nazanin; Du, Qingyang; Hu, Juejun; ... Show more Show less
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The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III–V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.
Date issued
2016-12Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringJournal
Semiconductor Science and Technology
Publisher
IOP Publishing
Citation
Arutt, Charles N et al. “The Study of Radiation Effects in Emerging Micro and Nano Electro Mechanical Systems (M and NEMs).” Semiconductor Science and Technology 32, 1 (December 2016): 013005 © 2016 IOP Publishing Ltd
Version: Author's final manuscript
ISSN
0268-1242
1361-6641