Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces
Author(s)Pinilla-Cienfuegos, Elena; Mañas-Valero, Samuel; Tatay, Sergio; Forment-Aliaga, Alicia; Coronado, Eugenio; Navarro Moratalla, Efren Adolfo; ... Show more Show less
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The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Metal Dichalcogenides (TMDCs). We show the results of a systematic study of the parameters that affect the LON process as well as the use of two different modes of lithographic operation: dynamic and static. The application of this kind of lithography in different types of TMDCs demonstrates the versatility of the LON for the creation of accurate and reproducible nanopatterns in exfoliated 2D-crystals and reveals the influence of the chemical composition and crystalline structure of the systems on the morphology of the resultant oxide motifs.
DepartmentMassachusetts Institute of Technology. Department of Physics; MIT Materials Research Laboratory
Pinilla-Cienfuegos, Elena et al. "Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces." Applied Sciences 6, 9 (September 2016): 50 © 2016 The Authors
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