Show simple item record

dc.contributor.authorPinilla-Cienfuegos, Elena
dc.contributor.authorMañas-Valero, Samuel
dc.contributor.authorTatay, Sergio
dc.contributor.authorForment-Aliaga, Alicia
dc.contributor.authorCoronado, Eugenio
dc.contributor.authorNavarro Moratalla, Efren Adolfo
dc.date.accessioned2018-04-13T18:55:29Z
dc.date.available2018-04-13T18:55:29Z
dc.date.issued2016-09
dc.date.submitted2016-07
dc.identifier.issn2076-3417
dc.identifier.urihttp://hdl.handle.net/1721.1/114721
dc.description.abstractThe integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Metal Dichalcogenides (TMDCs). We show the results of a systematic study of the parameters that affect the LON process as well as the use of two different modes of lithographic operation: dynamic and static. The application of this kind of lithography in different types of TMDCs demonstrates the versatility of the LON for the creation of accurate and reproducible nanopatterns in exfoliated 2D-crystals and reveals the influence of the chemical composition and crystalline structure of the systems on the morphology of the resultant oxide motifs.en_US
dc.publisherMDPI AGen_US
dc.relation.isversionofhttp://dx.doi.org/10.3390/app6090250en_US
dc.rightsCreative Commons Attributionen_US
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en_US
dc.sourceMultidisciplinary Digital Publishing Instituteen_US
dc.titleLocal Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfacesen_US
dc.typeArticleen_US
dc.identifier.citationPinilla-Cienfuegos, Elena et al. "Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces." Applied Sciences 6, 9 (September 2016): 50 © 2016 The Authorsen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Physicsen_US
dc.contributor.departmentMIT Materials Research Laboratoryen_US
dc.contributor.mitauthorNavarro Moratalla, Efren Adolfo
dc.relation.journalApplied Sciencesen_US
dc.eprint.versionFinal published versionen_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dc.date.updated2018-03-22T12:46:23Z
dspace.orderedauthorsPinilla-Cienfuegos, Elena; Mañas-Valero, Samuel; Navarro-Moratalla, Efrén; Tatay, Sergio; Forment-Aliaga, Alicia; Coronado, Eugenioen_US
dspace.embargo.termsNen_US
dc.identifier.orcidhttps://orcid.org/0000-0002-3430-6599
mit.licensePUBLISHER_CCen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record