Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage
Author(s)Preston, Daniel John; Anders, Ariel S; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; Dai, DingRan; Wang, Evelyn; ... Show more Show less
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We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1° while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Mechanical Engineering
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Institute of Electrical and Electronics Engineers (IEEE)
Preston, Daniel J., Ariel Anders, Banafsheh Barabadi, Evelyn Tio, Yangying Zhu, DingRan Annie Dai, and Evelyn N. Wang. “Electrowetting-on-Dielectric Actuation of a Spatial and Angular Manipulation MEMS Stage.” 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (January 2017).
Author's final manuscript