Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage

Author(s)
Preston, Daniel John; Anders, Ariel S; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; ... Show more
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Abstract
We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1° while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.
Date issued
2017-01
URI
http://hdl.handle.net/1721.1/120025
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Mechanical Engineering
Journal
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Preston, Daniel J., Ariel Anders, Banafsheh Barabadi, Evelyn Tio, Yangying Zhu, DingRan Annie Dai, and Evelyn N. Wang. “Electrowetting-on-Dielectric Actuation of a Spatial and Angular Manipulation MEMS Stage.” 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (January 2017).
Version: Author's final manuscript
ISBN
978-1-5090-5078-9
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