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Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage

dc.contributor.authorPreston, Daniel John
dc.contributor.authorAnders, Ariel S
dc.contributor.authorBarabadi, Banafsheh
dc.contributor.authorTio, Evelyn
dc.contributor.authorZhu, Yangying
dc.contributor.authorDai, DingRan
dc.contributor.authorWang, Evelyn
dc.date.accessioned2019-01-14T17:32:14Z
dc.date.available2019-01-14T17:32:14Z
dc.date.issued2017-01
dc.identifier.isbn978-1-5090-5078-9
dc.identifier.urihttp://hdl.handle.net/1721.1/120025
dc.description.abstractWe demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1° while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.en_US
dc.description.sponsorshipUnited States. Office of Naval Researchen_US
dc.description.sponsorshipNational Science Foundation (U.S.). Graduate Research Fellowship (Grant No. 1122374)en_US
dc.description.sponsorshipNational Science Foundation (U.S.). Major Research Instrumentation Grant for Rapid Response Researchen_US
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/MEMSYS.2017.7863521en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceMIT web domainen_US
dc.titleElectrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stageen_US
dc.typeArticleen_US
dc.identifier.citationPreston, Daniel J., Ariel Anders, Banafsheh Barabadi, Evelyn Tio, Yangying Zhu, DingRan Annie Dai, and Evelyn N. Wang. “Electrowetting-on-Dielectric Actuation of a Spatial and Angular Manipulation MEMS Stage.” 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (January 2017).en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineeringen_US
dc.contributor.mitauthorPreston, Daniel John
dc.contributor.mitauthorAnders, Ariel S
dc.contributor.mitauthorBarabadi, Banafsheh
dc.contributor.mitauthorTio, Evelyn
dc.contributor.mitauthorZhu, Yangying
dc.contributor.mitauthorDai, DingRan
dc.contributor.mitauthorWang, Evelyn
dc.relation.journal2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)en_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
eprint.statushttp://purl.org/eprint/status/NonPeerRevieweden_US
dc.date.updated2019-01-10T16:01:02Z
dspace.orderedauthorsPreston, Daniel J.; Anders, Ariel; Barabadi, Banafsheh; Tio, Evelyn; Zhu, Yangying; Dai, DingRan Annie; Wang, Evelyn N.en_US
dspace.embargo.termsNen_US
dc.identifier.orcidhttps://orcid.org/0000-0002-0096-0285
dc.identifier.orcidhttps://orcid.org/0000-0001-6688-9082
dc.identifier.orcidhttps://orcid.org/0000-0003-0550-1739
dc.identifier.orcidhttps://orcid.org/0000-0001-9185-3161
dc.identifier.orcidhttps://orcid.org/0000-0001-7045-1200
mit.licenseOPEN_ACCESS_POLICYen_US


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