Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks
Author(s)Zheng, Jiabao; Lienhard, Benjamin; Bersin, Eric Alexander; Englund, Dirk R.
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Nanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0 ± 5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The lithographically precise patterning of large areas of diamond by self-assembled masks and their release into uniformly sized nanodiamonds open up new possibilities for quantum information processing and sensing.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Springer Science and Business Media LLC
Zheng, Jiabao et al. "Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks." Scientific reports 9(2019): 6914 © 2019 The Author(s)
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