Tunable impedance matching networks based on phase-switched impedance modulation
Author(s)
Jurkov, Alexander; Radomski, Aaron; Perreault, David J
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The ability to provide accurate, rapid and dynamically-controlled impedance matching offers significant advantages to a wide range of present and emerging radio-frequency (RF) power applications. This work develops a new type of tunable impedance matching networks (TMN) that enables a combination of much faster and more accurate impedance matching than is available with conventional techniques. This implementation is based on a narrow-band technique, termed here phase-switched impedance modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. The proposed approach provides absorption of device parasitics and zero-voltage switching (ZVS) of the active devices, and we introduce control techniques that enable ZVS operation to be maintained across operating conditions. A prototype PSIM-based TMN is developed that provides a 50 Ohms match over a load impedance range suitable for inductively-coupled plasma processes. The prototype TMN operates at frequencies centered around 13.56 MHz at input RF power levels of up to 150 W.
Date issued
2017-10Journal
Proceedings of the 2017 IEEE Energy Conversion Congress and Exposition
Publisher
IEEE
Citation
Jurkov, Alexander S., Aaron Radomski, and David J. Perreault. "Tunable impedance matching networks based on phase-switched impedance modulation." IEEE Energy Conversion Congress and Exposition, October 2017, Cincinnati, OH, USA, IEEE, 2017.
Version: Author's final manuscript
ISBN
9781509029983