dc.contributor.author | Jurkov, Alexander | |
dc.contributor.author | Radomski, Aaron | |
dc.contributor.author | Perreault, David J | |
dc.date.accessioned | 2020-05-13T19:38:20Z | |
dc.date.available | 2020-05-13T19:38:20Z | |
dc.date.issued | 2017-10 | |
dc.identifier.isbn | 9781509029983 | |
dc.identifier.uri | https://hdl.handle.net/1721.1/125221 | |
dc.description.abstract | The ability to provide accurate, rapid and dynamically-controlled impedance matching offers significant advantages to a wide range of present and emerging radio-frequency (RF) power applications. This work develops a new type of tunable impedance matching networks (TMN) that enables a combination of much faster and more accurate impedance matching than is available with conventional techniques. This implementation is based on a narrow-band technique, termed here phase-switched impedance modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. The proposed approach provides absorption of device parasitics and zero-voltage switching (ZVS) of the active devices, and we introduce control techniques that enable ZVS operation to be maintained across operating conditions. A prototype PSIM-based TMN is developed that provides a 50 Ohms match over a load impedance range suitable for inductively-coupled plasma processes. The prototype TMN operates at frequencies centered around 13.56 MHz at input RF power levels of up to 150 W. | en_US |
dc.language.iso | en | |
dc.publisher | IEEE | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1109/ecce.2017.8095887 | en_US |
dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
dc.source | Prof. Perreault via Phoebe Ayers | en_US |
dc.title | Tunable impedance matching networks based on phase-switched impedance modulation | en_US |
dc.type | Article | en_US |
dc.identifier.citation | Jurkov, Alexander S., Aaron Radomski, and David J. Perreault. "Tunable impedance matching networks based on phase-switched impedance modulation." IEEE Energy Conversion Congress and Exposition, October 2017, Cincinnati, OH, USA, IEEE, 2017. | en_US |
dc.relation.journal | Proceedings of the 2017 IEEE Energy Conversion Congress and Exposition | en_US |
dc.eprint.version | Author's final manuscript | en_US |
dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
eprint.status | http://purl.org/eprint/status/NonPeerReviewed | en_US |
dc.date.updated | 2020-01-16T13:25:18Z | |
dspace.date.submission | 2020-01-16T13:25:20Z | |