Show simple item record

dc.contributor.authorJurkov, Alexander
dc.contributor.authorRadomski, Aaron
dc.contributor.authorPerreault, David J
dc.date.accessioned2020-05-13T19:38:20Z
dc.date.available2020-05-13T19:38:20Z
dc.date.issued2017-10
dc.identifier.isbn9781509029983
dc.identifier.urihttps://hdl.handle.net/1721.1/125221
dc.description.abstractThe ability to provide accurate, rapid and dynamically-controlled impedance matching offers significant advantages to a wide range of present and emerging radio-frequency (RF) power applications. This work develops a new type of tunable impedance matching networks (TMN) that enables a combination of much faster and more accurate impedance matching than is available with conventional techniques. This implementation is based on a narrow-band technique, termed here phase-switched impedance modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. The proposed approach provides absorption of device parasitics and zero-voltage switching (ZVS) of the active devices, and we introduce control techniques that enable ZVS operation to be maintained across operating conditions. A prototype PSIM-based TMN is developed that provides a 50 Ohms match over a load impedance range suitable for inductively-coupled plasma processes. The prototype TMN operates at frequencies centered around 13.56 MHz at input RF power levels of up to 150 W.en_US
dc.language.isoen
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ecce.2017.8095887en_US
dc.rightsCreative Commons Attribution-Noncommercial-Share Alikeen_US
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/4.0/en_US
dc.sourceProf. Perreault via Phoebe Ayersen_US
dc.titleTunable impedance matching networks based on phase-switched impedance modulationen_US
dc.typeArticleen_US
dc.identifier.citationJurkov, Alexander S., Aaron Radomski, and David J. Perreault. "Tunable impedance matching networks based on phase-switched impedance modulation." IEEE Energy Conversion Congress and Exposition, October 2017, Cincinnati, OH, USA, IEEE, 2017.en_US
dc.relation.journalProceedings of the 2017 IEEE Energy Conversion Congress and Expositionen_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
eprint.statushttp://purl.org/eprint/status/NonPeerRevieweden_US
dc.date.updated2020-01-16T13:25:18Z
dspace.date.submission2020-01-16T13:25:20Z


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record