dc.contributor.author | Su, P | |
dc.contributor.author | Han, Z | |
dc.contributor.author | Kita, D | |
dc.contributor.author | Becla, P | |
dc.contributor.author | Lin, H | |
dc.contributor.author | Deckoff-Jones, S | |
dc.contributor.author | Richardson, K | |
dc.contributor.author | Kimerling, LC | |
dc.contributor.author | Hu, J | |
dc.contributor.author | Agarwal, A | |
dc.date.accessioned | 2021-10-27T20:29:45Z | |
dc.date.available | 2021-10-27T20:29:45Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://hdl.handle.net/1721.1/135875 | |
dc.description.abstract | © 2019 Author(s). We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv. | |
dc.language.iso | en | |
dc.publisher | AIP Publishing | |
dc.relation.isversionof | 10.1063/1.5053599 | |
dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | |
dc.source | MIT web domain | |
dc.title | Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector | |
dc.type | Article | |
dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
dc.contributor.department | MIT Materials Research Laboratory | |
dc.relation.journal | Applied Physics Letters | |
dc.eprint.version | Final published version | |
dc.type.uri | http://purl.org/eprint/type/JournalArticle | |
eprint.status | http://purl.org/eprint/status/PeerReviewed | |
dc.date.updated | 2019-09-20T18:45:24Z | |
dspace.orderedauthors | Su, P; Han, Z; Kita, D; Becla, P; Lin, H; Deckoff-Jones, S; Richardson, K; Kimerling, LC; Hu, J; Agarwal, A | |
dspace.date.submission | 2019-09-20T18:45:25Z | |
mit.journal.volume | 114 | |
mit.journal.issue | 5 | |
mit.metadata.status | Authority Work and Publication Information Needed | |