| dc.contributor.author | Jiang, Bo | |
| dc.contributor.author | Meng, Kai | |
| dc.contributor.author | Youcef-Toumi, Kamal | |
| dc.date.accessioned | 2022-02-01T16:56:13Z | |
| dc.date.available | 2022-01-27T13:36:27Z | |
| dc.date.available | 2022-02-01T16:56:13Z | |
| dc.date.issued | 2021-08 | |
| dc.date.submitted | 2021-07 | |
| dc.identifier.issn | 1094-4087 | |
| dc.identifier.uri | https://hdl.handle.net/1721.1/139762.2 | |
| dc.description.abstract | Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method is then proposed to mitigate the effects of Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation, based on maximum likelihood estimation. The noise is characterized through experiments on an in-house setup. The improved performance of dimension reconstruction from the proposed method is demonstrated through simulations. | en_US |
| dc.language.iso | en | |
| dc.publisher | Optical Society of America | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1364/OE.432793 | en_US |
| dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
| dc.source | OSA Publishing | en_US |
| dc.title | Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Jiang, Bo, Meng, Kai and Youcef-Toumi, Kamal. 2021. "Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry." Optics Express, 29 (17). | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | |
| dc.relation.journal | Optics Express | en_US |
| dc.eprint.version | Final published version | en_US |
| dc.type.uri | http://purl.org/eprint/type/JournalArticle | en_US |
| eprint.status | http://purl.org/eprint/status/PeerReviewed | en_US |
| dc.date.updated | 2022-01-27T13:31:27Z | |
| dspace.orderedauthors | Jiang, B; Meng, K; Youcef-Toumi, K | en_US |
| dspace.date.submission | 2022-01-27T13:31:29Z | |
| mit.journal.volume | 29 | en_US |
| mit.journal.issue | 17 | en_US |
| mit.license | PUBLISHER_POLICY | |
| mit.metadata.status | Authority Work Needed | en_US |
