GaN Nanowire Field Emitters with a Self-Aligned Gate Process

Author(s)
Shih, Pao-Chuan; Rughoobur, Girish; Xiang, Peng; Liu, Kai; Cheng, Kai; ... Show more
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Date issued
2020-06
URI
https://hdl.handle.net/1721.1/141927
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Microsystems Technology Laboratories
Journal
2020 Device Research Conference (DRC)
Publisher
IEEE
Citation
Shih, Pao-Chuan, Rughoobur, Girish, Xiang, Peng, Liu, Kai, Cheng, Kai et al. 2020. "GaN Nanowire Field Emitters with a Self-Aligned Gate Process." 2020 Device Research Conference (DRC).
Version: Author's final manuscript
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