Healing of donor defect states in monolayer molybdenum disulfide using oxygen-incorporated chemical vapour deposition
Author(s)
Shen, Pin-Chun; Lin, Yuxuan; Su, Cong; McGahan, Christina; Lu, Ang-Yu; Ji, Xiang; Wang, Xingzhi; Wang, Haozhe; Mao, Nannan; Guo, Yunfan; Park, Ji-Hoon; Wang, Yan; Tisdale, William; Li, Ju; Ling, Xi; Aidala, Katherine E.; Palacios, Tomás; Kong, Jing; ... Show more Show less
DownloadAccepted version (10.15Mb)
Publisher Policy
Publisher Policy
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Terms of use
Metadata
Show full item recordDate issued
2021-12Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Nuclear Science and Engineering; Massachusetts Institute of Technology. Department of Chemical EngineeringJournal
Nature Electronics
Publisher
Springer Science and Business Media LLC
Citation
Shen, Pin-Chun, Lin, Yuxuan, Su, Cong, McGahan, Christina, Lu, Ang-Yu et al. 2022. "Healing of donor defect states in monolayer molybdenum disulfide using oxygen-incorporated chemical vapour deposition." Nature Electronics, 5 (1).
Version: Author's final manuscript
ISSN
2520-1131