High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture
Author(s)
Dong, Mark; Clark, Genevieve; Leenheer, Andrew J; Zimmermann, Matthew; Dominguez, Daniel; Menssen, Adrian J; Heim, David; Gilbert, Gerald; Englund, Dirk; Eichenfield, Matt; ... Show more Show less![Thumbnail](/bitstream/handle/1721.1/144031/s41566-021-00903-x.pdf.jpg?sequence=4&isAllowed=y)
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<jats:title>Abstract</jats:title><jats:p>Recent advances in photonic integrated circuits have enabled a new generation of programmable Mach–Zehnder meshes (MZMs) realized by using cascaded Mach–Zehnder interferometers capable of universal linear-optical transformations on <jats:italic>N</jats:italic> input/output optical modes. MZMs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, MZM implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here we introduce a large-scale MZM platform made in a 200 mm complementary metal–oxide–semiconductor foundry, which uses aluminium nitride piezo-optomechanical actuators coupled to silicon nitride waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible–near-infrared wavelengths. Moreover, the vanishingly low hold-power consumption of the piezo-actuators enables these photonic integrated circuits to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications.</jats:p>
Date issued
2022Department
Massachusetts Institute of Technology. Research Laboratory of ElectronicsJournal
Nature Photonics
Publisher
Springer Science and Business Media LLC
Citation
Dong, Mark, Clark, Genevieve, Leenheer, Andrew J, Zimmermann, Matthew, Dominguez, Daniel et al. 2022. "High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture." Nature Photonics, 16 (1).
Version: Final published version