On the use of physics in machine learning for manufacturing process inspection
Author(s)
Barbastathis, George; Zhang, Qihang; Pandit, Ajinkya; Tang, Wenlong; Papageorgiou, Charles; Braatz, Richard; Myerson, Allan S; Tan, Bingyao; Schmetterer, Leopold; ... Show more Show less
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We discuss the use of machine learning in computational imaging for manufacturing process inspection and control. In a recent article we described a physics-enhanced auto-correlation based estimator (Peace) for quantitative speckle. We derived an explicit forward relationship between the Particle Size Distribution (PSD) and the speckle autocorrelation for particle sizes significantly larger than the wavelength (x100 to approximately x1,000). We subsequently trained a machine learning kernel to invert the autocorrelation and obtain the PSD, using the explicit forward model to reduce the number of experimentally acquired examples. In this talk, we present an expanded discussion of Peace and its properties, including spatial and temporal sampling and accuracy, and more general applications.
Description
SPIE Optical Metrology, 2023, Munich, Germany
Date issued
2023-08-11Department
Massachusetts Institute of Technology. Department of Mechanical Engineering; Massachusetts Institute of Technology. Department of Chemical Engineering; Singapore-MIT Alliance in Research and Technology (SMART)Journal
Optical Methods for Inspection, Characterization, and Imaging of Biomaterials VI
Publisher
SPIE
Citation
Proceedings Volume 12622, Optical Methods for Inspection, Characterization, and Imaging of Biomaterials VI; 126220Y (2023).
Version: Final published version