| dc.contributor.author | Morecroft, Debbie | en_US |
| dc.contributor.author | Yang, Joel K. W. | en_US |
| dc.contributor.author | Schuster, S. | en_US |
| dc.contributor.author | Berggren, Karl K. | en_US |
| dc.contributor.author | Xia, Qiangfei | en_US |
| dc.contributor.author | Wu, Wei | en_US |
| dc.contributor.author | Williams, R. Stanley | en_US |
| dc.date.accessioned | 2009-10-19T13:46:57Z | |
| dc.date.available | 2009-10-19T13:46:57Z | |
| dc.date.issued | 2009-12 | |
| dc.date.submitted | 2009-07 | |
| dc.identifier.issn | 1071-1023 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/49496 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | American Institute of Physics | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1116/1.3264670 | |
| dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/3.0/ | en_US |
| dc.source | Alicia Akins | en_US |
| dc.title | Sub-15-nm nanoimprint molds and pattern transfer | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Morecroft, Debbie et al. “Sub-15 nm nanoimprint molds and pattern transfer.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27.6 (2009): 2837. | |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Research Laboratory of Electronics | en_US |
| dc.contributor.approver | Berggren, Karl K. | en_US |
| dc.contributor.mitauthor | Morecroft, Debbie | en_US |
| dc.contributor.mitauthor | Yang, Joel K. W. | en_US |
| dc.contributor.mitauthor | Schuster, S. | en_US |
| dc.contributor.mitauthor | Berggren, Karl K. | en_US |
| dc.relation.journal | Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures | en_US |
| dc.eprint.version | Original manuscript | en_US |
| dc.type.uri | http://purl.org/eprint/type/SubmittedJournalArticle | en_US |
| dspace.orderedauthors | Morecroft, Debbie; Yang, Joel K. W.; Schuster, S.; Berggren, Karl K.; Xia, Qiangfei; Wu, Wei; Williams, R. Stanley | |
| dc.identifier.orcid | https://orcid.org/0000-0001-7453-9031 | |
| mit.license | OPEN_ACCESS_POLICY | en_US |
| mit.metadata.status | Complete | |
