Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications

Author(s)
Stojanovic, Vladimir Marko; Chen, Fred Fu-Chin; Fariborzi, Hossein; Spencer, Matthew; Nathanael, Rhesa; ... Show more
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Abstract
A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.
Date issued
2010-02
URI
http://hdl.handle.net/1721.1/60377
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Journal
IEEE International Solid-State Circuits Conference. Digest of technical papers
Publisher
Institute of Electrical and Electronics Engineers
Citation
Chen, F. et al. “Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.” Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International. 2010. 150-151. © 2010, IEEE
Version: Final published version
Other identifiers
INSPEC Accession Number: 11204907
ISBN
978-1-4244-6033-5
ISSN
0193-6530
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