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dc.contributor.authorStojanovic, Vladimir Marko
dc.contributor.authorChen, Fred Fu-Chin
dc.contributor.authorFariborzi, Hossein
dc.contributor.authorSpencer, Matthew
dc.contributor.authorNathanael, Rhesa
dc.contributor.authorWang, Chengcheng
dc.contributor.authorGupta, Abhinav
dc.contributor.authorKam, Hei
dc.contributor.authorPott, Vincent
dc.contributor.authorJeon, Jaeseok
dc.contributor.authorLiu, Tsu-Jae King
dc.contributor.authorMarkovic, Dejan
dc.contributor.authorAlon, Elad
dc.date.accessioned2011-01-03T22:36:20Z
dc.date.available2011-01-03T22:36:20Z
dc.date.issued2010-02
dc.identifier.isbn978-1-4244-6033-5
dc.identifier.issn0193-6530
dc.identifier.otherINSPEC Accession Number: 11204907
dc.identifier.urihttp://hdl.handle.net/1721.1/60377
dc.description.abstractA testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.en_US
dc.description.sponsorshipNational Science Foundation (U.S.) (Infrastructure Grant No. 0403427)en_US
dc.description.sponsorshipUnited States. Defense Advanced Research Projects Agencyen_US
dc.description.sponsorshipSemiconductor Research Corporation. Center for Materials, Structures and Devicesen_US
dc.description.sponsorshipSemiconductor Research Corporation. Center for Circuit and System Solutionsen_US
dc.description.sponsorshipBerkeley Wireless Research Centeren_US
dc.language.isoen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ISSCC.2010.5434010en_US
dc.rightsArticle is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.en_US
dc.sourceMIT web domainen_US
dc.titleDemonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applicationsen_US
dc.typeArticleen_US
dc.identifier.citationChen, F. et al. “Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.” Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International. 2010. 150-151. © 2010, IEEEen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Scienceen_US
dc.contributor.approverStojanovic, Vladimir Marko
dc.contributor.mitauthorStojanovic, Vladimir Marko
dc.contributor.mitauthorChen, Fred Fu-Chin
dc.contributor.mitauthorFariborzi, Hossein
dc.relation.journalIEEE International Solid-State Circuits Conference. Digest of technical papersen_US
dc.eprint.versionFinal published versionen_US
dc.type.urihttp://purl.org/eprint/type/ConferencePaperen_US
dspace.orderedauthorsChen, Fred; Spencer, Matthew; Nathanael, Rhesa; Wang, Chengcheng; Fariborzi, Hossein; Gupta, Abhinav; Kam, Hei; Pott, Vincent; Jeon, Jaeseok; Liu, Tsu-Jae King; Markovic, Dejan; Stojanovic, Vladimir; Alon, Eladen
mit.licensePUBLISHER_POLICYen_US
mit.metadata.statusComplete


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