| dc.contributor.author | Stojanovic, Vladimir Marko | |
| dc.contributor.author | Chen, Fred Fu-Chin | |
| dc.contributor.author | Fariborzi, Hossein | |
| dc.contributor.author | Spencer, Matthew | |
| dc.contributor.author | Nathanael, Rhesa | |
| dc.contributor.author | Wang, Chengcheng | |
| dc.contributor.author | Gupta, Abhinav | |
| dc.contributor.author | Kam, Hei | |
| dc.contributor.author | Pott, Vincent | |
| dc.contributor.author | Jeon, Jaeseok | |
| dc.contributor.author | Liu, Tsu-Jae King | |
| dc.contributor.author | Markovic, Dejan | |
| dc.contributor.author | Alon, Elad | |
| dc.date.accessioned | 2011-01-03T22:36:20Z | |
| dc.date.available | 2011-01-03T22:36:20Z | |
| dc.date.issued | 2010-02 | |
| dc.identifier.isbn | 978-1-4244-6033-5 | |
| dc.identifier.issn | 0193-6530 | |
| dc.identifier.other | INSPEC Accession Number: 11204907 | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/60377 | |
| dc.description.abstract | A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM. | en_US |
| dc.description.sponsorship | National Science Foundation (U.S.) (Infrastructure Grant No. 0403427) | en_US |
| dc.description.sponsorship | United States. Defense Advanced Research Projects Agency | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation. Center for Materials, Structures and Devices | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation. Center for Circuit and System Solutions | en_US |
| dc.description.sponsorship | Berkeley Wireless Research Center | en_US |
| dc.language.iso | en_US | |
| dc.publisher | Institute of Electrical and Electronics Engineers | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1109/ISSCC.2010.5434010 | en_US |
| dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
| dc.source | MIT web domain | en_US |
| dc.title | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Chen, F. et al. “Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.” Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International. 2010. 150-151. © 2010, IEEE | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.contributor.approver | Stojanovic, Vladimir Marko | |
| dc.contributor.mitauthor | Stojanovic, Vladimir Marko | |
| dc.contributor.mitauthor | Chen, Fred Fu-Chin | |
| dc.contributor.mitauthor | Fariborzi, Hossein | |
| dc.relation.journal | IEEE International Solid-State Circuits Conference. Digest of technical papers | en_US |
| dc.eprint.version | Final published version | en_US |
| dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
| dspace.orderedauthors | Chen, Fred; Spencer, Matthew; Nathanael, Rhesa; Wang, Chengcheng; Fariborzi, Hossein; Gupta, Abhinav; Kam, Hei; Pott, Vincent; Jeon, Jaeseok; Liu, Tsu-Jae King; Markovic, Dejan; Stojanovic, Vladimir; Alon, Elad | en |
| mit.license | PUBLISHER_POLICY | en_US |
| mit.metadata.status | Complete | |