| dc.contributor.author | Ljubicic, Dean M. | |
| dc.contributor.author | Anthony, Brian | |
| dc.date.accessioned | 2011-02-14T14:51:00Z | |
| dc.date.available | 2011-02-14T14:51:00Z | |
| dc.date.issued | 2010-08 | |
| dc.date.submitted | 2010-08 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/60936 | |
| dc.description.abstract | Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry. | en_US |
| dc.language.iso | en_US | |
| dc.publisher | SPIE | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1117/12.860166 | en_US |
| dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
| dc.source | SPIE | en_US |
| dc.title | Development of a high-speed profilometer for manufacturing inspection | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Dean M. Ljubicic and Brian Anthony, "Development of a high-speed profilometer for manufacturing inspection", Proc. SPIE 7767, 776705 (2010); doi:10.1117/12.860166 © 2010 COPYRIGHT SPIE | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Mechanical Engineering | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity | en_US |
| dc.contributor.approver | Anthony, Brian | |
| dc.contributor.mitauthor | Ljubicic, Dean M. | |
| dc.contributor.mitauthor | Anthony, Brian | |
| dc.relation.journal | Proceedings of SPIE--the International Society for Optical Engineering | en_US |
| dc.eprint.version | Final published version | en_US |
| dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
| dspace.orderedauthors | Ljubicic, Dean M.; Anthony, Brian | en |
| mit.license | PUBLISHER_POLICY | en_US |
| mit.metadata.status | Complete | |
