Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
Author(s)Li, Shiguang; Xu, Zhiguang; Yoon, Soon Fatt; Fang, Zhong Ping
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This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber–based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.
DepartmentSingapore-MIT Alliance in Research and Technology (SMART)
Journal of Biomedical Optics
Society of Photo-optical Instrumentation Engineers
Shiguang Li, Zhiguang Xu, Soon Fatt Yoon and Zhong Ping Fang, "Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography", J. Biomed. Opt. 16, 066011 (Jun 02, 2011)© 2011 Society of Photo-Optical Instrumentation Engineers.
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