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dc.contributor.authorLi, Shiguang
dc.contributor.authorXu, Zhiguang
dc.contributor.authorYoon, Soon Fatt
dc.contributor.authorFang, Zhong Ping
dc.date.accessioned2011-11-10T14:34:09Z
dc.date.available2011-11-10T14:34:09Z
dc.date.issued2011-06
dc.date.submitted2011-04
dc.identifier.issn1083-3668
dc.identifier.urihttp://hdl.handle.net/1721.1/66996
dc.description.abstractThis paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber–based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.en_US
dc.language.isoen_US
dc.publisherSociety of Photo-optical Instrumentation Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1117/1.3590747en_US
dc.rightsArticle is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.en_US
dc.sourceSPIEen_US
dc.titleFeasibility study on bonding quality inspection of microfluidic devices by optical coherence tomographyen_US
dc.typeArticleen_US
dc.identifier.citationShiguang Li, Zhiguang Xu, Soon Fatt Yoon and Zhong Ping Fang, "Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography", J. Biomed. Opt. 16, 066011 (Jun 02, 2011)© 2011 Society of Photo-Optical Instrumentation Engineers.en_US
dc.contributor.departmentSingapore-MIT Alliance in Research and Technology (SMART)en_US
dc.contributor.approverXu, Zhiguang
dc.contributor.mitauthorXu, Zhiguang
dc.contributor.mitauthorLi, Shiguang
dc.contributor.mitauthorYoon, Soon Fatt
dc.relation.journalJournal of Biomedical Opticsen_US
dc.eprint.versionFinal published versionen_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dspace.orderedauthorsLi, Shiguang; Xu, Zhiguang; Yoon, Soon Fatt; Fang, Zhong Pingen
mit.licensePUBLISHER_POLICYen_US
mit.metadata.statusComplete


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