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High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

Author(s)
Cheung, Kerry; Velasquez-Heller, Luis Fernand; Akinwande, Akintunde Ibitayo
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Abstract
We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-the-art. We demonstrated that operating our device in the second stability region leads to higher performance despite the unconventional electrode geometry. The data also suggests ion behavior that deviates from the standard circular rod case, motivating new studies.
Date issued
2010-04
URI
http://hdl.handle.net/1721.1/69930
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Microsystems Technology Laboratories
Journal
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Cheung, Kerry, Luis F. Velasquez-Garcia, and Akintunde I. Akinwande. “High-performance MEMS Square Electrode Quadrupole Mass Filters for Chip-scale Mass Spectrometry.” IEEE, 2010. 867–870. Web. 4 Apr. 2012. © 2010 Institute of Electrical and Electronics Engineers
Version: Final published version
Other identifiers
INSPEC Accession Number: 11229666
ISBN
978-1-4244-5761-8
978-1-4244-5763-2
ISSN
1084-6999

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