High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

Abstract

We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-the-art. We demonstrated that operating our device in the second stability region leads to higher performance despite the unconventional electrode geometry. The data also suggests ion behavior that deviates from the standard circular rod case, motivating new studies.