| dc.contributor.author | Hu, Juejun | |
| dc.contributor.author | Musgraves, J. David | |
| dc.contributor.author | Carlie, Nathan | |
| dc.contributor.author | Zdyrko, Bogdan | |
| dc.contributor.author | Luzinov, Igor | |
| dc.contributor.author | Richardson, Kathleen | |
| dc.contributor.author | Agrawal, Anuradha Murthy | |
| dc.contributor.author | Kimerling, Lionel C. | |
| dc.date.accessioned | 2012-07-25T19:36:29Z | |
| dc.date.available | 2012-07-25T19:36:29Z | |
| dc.date.issued | 2011-01 | |
| dc.identifier.isbn | 9780819484826 | |
| dc.identifier.isbn | 0819484822 | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/71812 | |
| dc.description.abstract | In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed. | en_US |
| dc.description.sponsorship | United States. Dept. of Energy (award number DE-SC52-06NA27341) | en_US |
| dc.language.iso | en_US | |
| dc.publisher | Society of Photo-optical Instrumentation Engineers | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1117/12.871399 | en_US |
| dc.rights | Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. | en_US |
| dc.source | SPIE | en_US |
| dc.title | Development of chipscale chalcogenide glass based infrared chemical sensors | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson and Lionel Kimerling, "Development of chipscale chalcogenide glass based infrared chemical sensors", in Quantum Sensing and Nanophotonic Devices VIII, (Proc. of SPIE 7945, 79452C (2011). © 2011 SPIE. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Microphotonics Center | en_US |
| dc.contributor.approver | Agarwal, Anuradha Murthy | |
| dc.contributor.mitauthor | Agrawal, Anuradha Murthy | |
| dc.contributor.mitauthor | Kimerling, Lionel C. | |
| dc.relation.journal | Quantum Sensing and Nanophotonic Devices VIII | en_US |
| dc.eprint.version | Final published version | en_US |
| dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
| dspace.orderedauthors | Hu, Juejun; Musgraves, J. David; Carlie, Nathan; Zdyrko, Bogdan; Luzinov, Igor; Agarwal, Anu; Richardson, Kathleen; Kimerling, Lionel | en |
| dc.identifier.orcid | https://orcid.org/0000-0002-3913-6189 | |
| mit.license | PUBLISHER_POLICY | en_US |
| mit.metadata.status | Complete | |
