Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors
Author(s)
Yang, Joel K. W.; Kerman, Andrew J.; Dauler, Eric A.; Cord, Bryan M.; Anant, Vikas; Molnar, Richard J.; Berggren, Karl K.; ... Show more Show less
DownloadBerggren-Suppressed Critical.pdf (898.7Kb)
PUBLISHER_POLICY
Publisher Policy
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Terms of use
Metadata
Show full item recordAbstract
In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
Date issued
2009-06Department
Lincoln Laboratory; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer ScienceJournal
IEEE Transactions on Applied Superconductivity
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Yang, J.K.W. et al. “Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors <newline/>With High Fill-Factors.” IEEE Transactions on Applied Superconductivity 19.3 (2009): 318–322. © Copyright 2009 IEEE
Version: Final published version
ISSN
1051-8223
1558-2515