Characterization of sige-detector arrays for visible-NIR imaging sensor applications
Author(s)
Sood, Ashok K.; Richwine, Robert A.; Sood, Adam W.; Puri, Yash R.; DiLello, Nicole Ann; Hoyt, Judy L.; Akinwande, Tayo I.; Dhar, Nibir; Balcerak, Raymond S.; Bramhall, Thomas G.; ... Show more Show less
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SiGe based focal plane arrays offer a low cost alternative for developing visible- near-infrared focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based foal plane arrays take advantage of silicon based technology that promises small feature size, low dark current and compatibility with the low power silicon CMOS circuits for signal processing. This paper discusses performance characteristics for the SiGe based VIS-NIR Sensors for a variety of defense and commercial applications using small unit cell size and compare performance with InGaAs, InSb, and HgCdTe IRFPA's. We present results on the approach and device design for reducing the dark current in SiGe detector arrays. The electrical and optical properties of SiGe arrays at room temperature are discussed. We also discuss future integration path for SiGe devices with Si-MEMS Bolometers.
Date issued
2011-05Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Microsystems Technology LaboratoriesJournal
Proceedings of SPIE--the International Society for Optical Engineering; v. 8012
Publisher
SPIE
Citation
Ashok K. Sood ; Robert A. Richwine ; Adam W. Sood ; Yash R. Puri ; Nicole DiLello ; Judy L. Hoyt ; Tayo I. Akinwande ; Nibir Dhar ; Raymond S. Balcerak ; Thomas G. Bramhall; Characterization of SiGe-detector arrays for visible-NIR imaging sensor applications. Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 801240 (May 20, 2011). Copyright © 2011 SPIE Digital Library
Version: Final published version
ISSN
0277-786X