Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

Author(s)
Singer, Jonathan P.; Michel, Jurgen; Thomas, Edwin L.; Lin, Pao Tai; Kooi, Steven E; ... Show more
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Abstract
A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.
Date issued
2013-08
URI
http://hdl.handle.net/1721.1/89412
Department
Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies; MIT Materials Research Laboratory; Massachusetts Institute of Technology. Department of Materials Science and Engineering
Journal
Advanced Materials
Publisher
Wiley Blackwell
Citation
Singer, Jonathan P., Pao-Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel, and Edwin L. Thomas. “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient.” Advanced Materials 25, no. 42 (August 21, 2013): 6100–6105.
Version: Author's final manuscript
ISSN
09359648
1521-4095
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