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dc.contributor.authorSinger, Jonathan P.
dc.contributor.authorMichel, Jurgen
dc.contributor.authorThomas, Edwin L.
dc.contributor.authorLin, Pao Tai
dc.contributor.authorKooi, Steven E
dc.contributor.authorKimerling, Lionel C
dc.date.accessioned2014-09-10T15:48:37Z
dc.date.available2014-09-10T15:48:37Z
dc.date.issued2013-08
dc.date.submitted2013-06
dc.identifier.issn09359648
dc.identifier.issn1521-4095
dc.identifier.urihttp://hdl.handle.net/1721.1/89412
dc.description.abstractA positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.en_US
dc.description.sponsorshipUnited States. Army Research Office (Contract W911NF-07-D-0004)en_US
dc.description.sponsorshipSemiconductor Research Corporationen_US
dc.language.isoen_US
dc.publisherWiley Blackwellen_US
dc.relation.isversionofhttp://dx.doi.org/10.1002/adma.201302777en_US
dc.rightsArticle is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.en_US
dc.sourceJon Singeren_US
dc.titleDirect-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradienten_US
dc.typeArticleen_US
dc.identifier.citationSinger, Jonathan P., Pao-Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel, and Edwin L. Thomas. “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient.” Advanced Materials 25, no. 42 (August 21, 2013): 6100–6105.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Institute for Soldier Nanotechnologiesen_US
dc.contributor.departmentMIT Materials Research Laboratoryen_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Materials Science and Engineeringen_US
dc.contributor.mitauthorSinger, Jonathan P.en_US
dc.contributor.mitauthorLin, Pao Taien_US
dc.contributor.mitauthorKooi, Steven Earlen_US
dc.contributor.mitauthorKimerling, Lionel C.en_US
dc.contributor.mitauthorMichel, Jurgenen_US
dc.relation.journalAdvanced Materialsen_US
dc.eprint.versionAuthor's final manuscripten_US
dc.type.urihttp://purl.org/eprint/type/JournalArticleen_US
eprint.statushttp://purl.org/eprint/status/PeerRevieweden_US
dspace.orderedauthorsSinger, Jonathan P.; Lin, Pao-Tai; Kooi, Steven E.; Kimerling, Lionel C.; Michel, Jurgen; Thomas, Edwin L.en_US
dc.identifier.orcidhttps://orcid.org/0000-0002-3913-6189
mit.licensePUBLISHER_POLICYen_US
mit.metadata.statusComplete


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