2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators
Author(s)Weinstein, Dana; Popa, Laura Cornelia
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A 2D electron gas (2DEG) interdigitated transducer (IDT) in Gallium Nitride (GaN) resonators is introduced and demonstrated. This metal-free transduction does not suffer from the loss mechanisms associated with more commonly used metal electrodes. As a result, this transducer can be used for both the direct interrogation of GaN electromechanical properties and the realization of high Q resonators. A 1.2 GHz bulk acoustic resonator with mechanical Q of 1885 is demonstrated, with frequency quality factor product (f·Q) of 2.3×10[superscript 12], the highest measured in GaN to date.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Physics
Proceedings of the 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
Institute of Electrical and Electronics Engineers (IEEE)
Popa, Laura C., and Dana Weinstein. “2DEG Electrodes for Piezoelectric Transduction of AlGaN/GaN MEMS Resonators.” 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (July 2013).
Author's final manuscript