| dc.contributor.author | Weinstein, Dana | |
| dc.contributor.author | Popa, Laura Cornelia | |
| dc.date.accessioned | 2014-10-21T15:07:48Z | |
| dc.date.available | 2014-10-21T15:07:48Z | |
| dc.date.issued | 2013-07 | |
| dc.identifier.isbn | 978-1-4799-0342-9 | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/91022 | |
| dc.description.abstract | A 2D electron gas (2DEG) interdigitated transducer (IDT) in Gallium Nitride (GaN) resonators is introduced and demonstrated. This metal-free transduction does not suffer from the loss mechanisms associated with more commonly used metal electrodes. As a result, this transducer can be used for both the direct interrogation of GaN electromechanical properties and the realization of high Q resonators. A 1.2 GHz bulk acoustic resonator with mechanical Q of 1885 is demonstrated, with frequency quality factor product (f·Q) of 2.3×10[superscript 12], the highest measured in GaN to date. | en_US |
| dc.language.iso | en_US | |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1109/EFTF-IFC.2013.6702242 | en_US |
| dc.rights | Creative Commons Attribution-Noncommercial-Share Alike | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/4.0/ | en_US |
| dc.source | MIT web domain | en_US |
| dc.title | 2DEG electrodes for piezoelectric transduction of AlGaN/GaN MEMS resonators | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Popa, Laura C., and Dana Weinstein. “2DEG Electrodes for Piezoelectric Transduction of AlGaN/GaN MEMS Resonators.” 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (July 2013). | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Physics | en_US |
| dc.contributor.mitauthor | Popa, Laura Cornelia | en_US |
| dc.contributor.mitauthor | Weinstein, Dana | en_US |
| dc.relation.journal | Proceedings of the 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) | en_US |
| dc.eprint.version | Author's final manuscript | en_US |
| dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
| eprint.status | http://purl.org/eprint/status/NonPeerReviewed | en_US |
| dspace.orderedauthors | Popa, Laura C.; Weinstein, Dana | en_US |
| mit.license | OPEN_ACCESS_POLICY | en_US |
| mit.metadata.status | Complete | |
