Rectangular Symmetry Morphologies in a Topographically Templated Block Copolymer

Author(s)
Hannon, Adam F.; Gotrik, Kevin W.; Alexander-Katz, Alfredo; Ross, Caroline A.; Berggren, Karl K.; ... Show more
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Abstract
Using an array of majority-block-functionalized posts makes it possible to locally control the self-assembly of a block copolymer and achieve several morphologies on a single substrate. A template consisting of a square symmetry array of posts produces a square-symmetry lattice of microdomains, which doubles the areal density of features.
Date issued
2012-06
URI
http://hdl.handle.net/1721.1/92712
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Research Laboratory of Electronics
Journal
Advanced Materials
Publisher
Wiley Blackwell
Citation
Tavakkoli K. G., Amir, Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross, and Karl K. Berggren. “Rectangular Symmetry Morphologies in a Topographically Templated Block Copolymer.” Advanced Materials 24, no. 31 (June 21, 2012): 4249–4254.
Version: Author's final manuscript
ISSN
09359648
1521-4095
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