Infrared transmissometer to measure the thickness of NbN thin films
Author(s)Sunter, Kristen A.; Lang, Christopher I.; Berggren, Karl K.; Dane, Andrew Edward
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We present an optical setup that can be used to characterize the thicknesses of thin NbN films to screen samples for fabrication and to better model the performance of the resulting superconducting nanowire single photon detectors. The infrared transmissometer reported here is easy to use, gives results within minutes, and is nondestructive. Thus, the thickness measurement can be easily integrated into the workflow of deposition and characterization. Comparison to a similar visible-wavelength transmissometer is provided.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Research Laboratory of Electronics
Optical Society of America
Sunter, Kristen A., Andrew E. Dane, Christopher I. Lang, and Karl K. Berggren. “Infrared Transmissometer to Measure the Thickness of NbN Thin Films.” Applied Optics 54, no. 18 (2015): 5743.
Author's final manuscript