| dc.contributor.author | Demirtas, Sefa | |
| dc.contributor.author | del Alamo, Jesus A. | |
| dc.contributor.author | Gajewski, Donald A. | |
| dc.contributor.author | Hanson, Allen | |
| dc.date.accessioned | 2012-07-11T15:41:46Z | |
| dc.date.available | 2012-07-11T15:41:46Z | |
| dc.date.issued | 2009-05 | |
| dc.identifier.uri | http://hdl.handle.net/1721.1/71582 | |
| dc.description | CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA | en_US |
| dc.description.abstract | We have studied the reliability of intrinsic SiN MIM capacitors designed for 48 V and 125 [superscript 0]C operation and manufactured in a GaN process flow. It is shown that very small area capacitors (10um x 10um) with a dielectric thickness of 400nm exhibit lifetimes as long as 1.48E10 hours under such conditions. | en_US |
| dc.language.iso | en_US | |
| dc.publisher | CS ManTech | en_US |
| dc.relation.isversionof | http://www.csmantech.org/Digests/2009/2009%20Papers/4.2.pdf | en_US |
| dc.rights | Creative Commons Attribution-Noncommercial-Share Alike 3.0 | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-sa/3.0/ | en_US |
| dc.source | del Alamo via Amy Stout | en_US |
| dc.title | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process | en_US |
| dc.type | Article | en_US |
| dc.identifier.citation | Demirtas, Sefa, et al. "Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process." CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA http://www.csmantech.org/Digests/2009/2009%20Papers/4.2.pdf | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | en_US |
| dc.contributor.approver | del Alamo, Jesus A. | |
| dc.contributor.mitauthor | Demirtas, Sefa | |
| dc.contributor.mitauthor | del Alamo, Jesus A. | |
| dc.relation.journal | International Conference on Compound Semiconductor Manufacturing Technology (2009 On-line Digest) | en_US |
| dc.eprint.version | Author's final manuscript | en_US |
| dc.type.uri | http://purl.org/eprint/type/ConferencePaper | en_US |
| dspace.orderedauthors | Demirtas, Sefa; del Alamo, Jesus A.; Gajewski, Donald A.; Hanson, Allen | |
| mit.license | OPEN_ACCESS_POLICY | en_US |
| mit.metadata.status | Complete | |
