Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition
Author(s)Wang, H.; Yu, L.; Lee, Y.-H.; Fang, W.; Hsu, Allen Long; Chin, M.; Dubey, Madan; Li, L.-J.; Kong, Jing; Herring, Patrick Kenichi; Palacios, Tomas; ... Show more Show less
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2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental building blocks of digital electronics, such as inverters and NAND gates, are fabricated to demonstrate its capability for logic applications.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Physics; Massachusetts Institute of Technology. Microsystems Technology Laboratories
Proceedings of the 2012 International Electron Devices Meeting (IEDM)
Institute of Electrical and Electronics Engineers (IEEE)
Wang, H., L. Yu, Y.-H. Lee, W. Fang, A. Hsu, P. Herring, M. Chin, et al. “Large-Scale 2D Electronics Based on Single-Layer MoS<inf>2</inf> Grown by Chemical Vapor Deposition.” 2012 International Electron Devices Meeting (n.d.).
Author's final manuscript