Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

Author(s)
Wang, H.; Yu, L.; Lee, Y.-H.; Fang, W.; Hsu, Allen Long; ... Show more
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Abstract
2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental building blocks of digital electronics, such as inverters and NAND gates, are fabricated to demonstrate its capability for logic applications.
Date issued
2012-12
URI
http://hdl.handle.net/1721.1/87106
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Department of Physics; Massachusetts Institute of Technology. Microsystems Technology Laboratories
Journal
Proceedings of the 2012 International Electron Devices Meeting (IEDM)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Wang, H., L. Yu, Y.-H. Lee, W. Fang, A. Hsu, P. Herring, M. Chin, et al. “Large-Scale 2D Electronics Based on Single-Layer MoS<inf>2</inf> Grown by Chemical Vapor Deposition.” 2012 International Electron Devices Meeting (n.d.).
Version: Author's final manuscript
ISBN
978-1-4673-4871-3
978-1-4673-4872-0
978-1-4673-4870-6
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