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Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact
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Laine, Hannu S.; Vahlman, Henri; Haarahiltunen, Antti; Jensen, Mallory A.; Modanese, Chiara; Wagner, Matthias; Wolny, Franziska; Buonassisi, Tonio; Savin, Hele; ... Show more Show less
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2018Publisher
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Laine, Hannu S., Vahlman, Henri, Haarahiltunen, Antti, Jensen, Mallory A., Modanese, Chiara et al. 2018. "Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact." 1999.
Version: Final published version